ICP Residual Gas Color Analysis

Due to different gasses pumping out of chambers at different rates¬†(i.e. Hydrogen always has a low pumping speed) and air’s natural composition changing glow discharge colors can be observed while pumping down a vacuum chamber. This was an attempt to estimate the pressure of the chamber indirectly during a pump down by observing and analyzing the¬†inductively coupled plasma color at constant RF voltage.

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