You can see the opened specimen stage of my SEM in these pictures, notice the backscattered electron detector in the center of the coulumn in the second picture and the faraday cage on the right. The faraday cage is positively biased to attract secondary electrons to it and into the scintillator.
A 6mhz oscillator can was cut up with pliers and the top was removed to expose the quartz crystal. The output is AC coupled (high pass filtered) to the positive (+5v) rail so that a single coax cable can be used to connect this to the thickness monitor as the power is basically just a DC offset on the signal. If you buy a pack of crystals from somewhere like Lesker they will (depending on your thickness monitor) most likely require the usage of an external oscillator. Such a circuit can be made by a complimentary pair or NPN and PNP transistors and couple passive components. Thanks to Ben from Applied Science for the idea.
Abstract: The quartz microbalance is a quick way of monitoring thin film thicknesses in real time, a bare quartz crystal which oscillates at a known frequency is placed in the chamber near the substrate involved in deposition. As the film accumulates on the crystal, it gains mass and the resonant frequency is lowered. The cumulative frequency change is analyzed and interpreted as the rate of accumulation the rate is integrated into a total thickness. Note that accumulation rate is the proper term for deposition rate, as in many cases (sputtering) the actual deposition rate is higher but some atoms are resputtered off the substrate due to high energy molecules in the chamber, substrate temperature, etc. and the total film thickness can momentarily decrease. The net result of the deposition and resputtering is known as accumulation
Ion gauges (hot cathode ionization gauges) are very sensitive high-ultra high vacuum gauges. I got a second gauge because I was getting weird values from my first gauge which I suspected was from a degrading filament.
My vacuum chamber which I am setting up for thermal evaporation has a large rectangular flange which has grooves for ISO style clamps and 2 locator pins. This flange may have been used for something like a load lock but as far as I could tell it is not a standard size so a custom block off plate was designed and machined from SS with grooves on the back for clamps, 2 pressed locator pins, and a viton o-ring. Mating surface was hand lapped to ensure good vacuum seal. Made by the extremely talented J.D Guerard machining company.
Installation of Varian Navigator TV 141 Turbomolecular Pump on a 6″ CF to ISO 100 elbow – custom Lesker part. Pump controller is integrated and is powered by 240v single phase. Backing line is KF16 to KF25 conical adapter and the KF25 stainless hose runs to a heated vapor trap and then to an Edwards oil rotary vane pump. Turbo pump speed is ~120L/s!!