services

Services

  • Scanning Electron Microscope

    – 6″/150mm samples, 1.5nm resolution, secondary and backscattered electron detectors, motorized X/Y and Z/THETA/TILT

  • SEM Sample Preparation 

    – sputtering metalization and sample mounting

  • Thermal Evaporation Deposition 

    – dual sources with QCM rate/thickness monitor and in situ plasma cleaning if requested

  • Sputter Deposition 

    – 4″ target RF or DC with QCM rate/thickness monitor and in situ plasma cleaning if requested. O2/N2/Ar/He available

  • Oxygen Plasma Cleaning 

    – aggressive RF plasma cleaning for 8″ substrate, can remove photoresist

  • Plasma Etching 

    – 8″ substrate provide your own gas, dual mass flow controllers

  • Custom High Vacuum Chamber and Instrumentation Design 

    – design and fabrication of automated chambers and nanofabrication process tools

  • UV-VIS Spectrometer 

    – transmittance, reflectance, absorbance, and fluorescence decay measurements with xenon flash lamp

  • Photolithography 

    – 1um process, maskless, will apply/bake/expose/develop resist

  • Semiconductor Fabrication 

    – custom masked and doped semiconductor devices on Silicon, 2/4/6″ (50/100/150mm) wafers available, Phosphorus and Boron doping via thermal diffusion, wet thermal oxidation, and HF/HNO3/H3PO4/H2SO4 etching available

  • 3D Printing 

    – 7.75×7.75×14.75″ build area, 100um layer height, PLA/ABS/Nylon/Flexible material, 10 colors available

  • General Electrical Engineering 

    – custom PCB layout/design, etc.