Mark IV Maskless Submicron Photolithography Stepper

Details and photos of my newest maskless photolithography stepper have been posted here: Info Page

_D7V8230

Automated DLP submicron stepper for 2″ (50mm) wafers with LabView control, computer alignment, and wafer vacuum chuck. Based on an old Nikon microscope with custom optics and in-situ UV-VIS spectroscopy for illumination process control. Diffraction-limited resolution is <250nm with a 365nm light source.

SEM image
SEM image

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